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Surface slope measurement of steep silicon V-grooves using high NA Linnik interferometry [Dataset]

Description

This dataset containes raw measurement data from a coherence scanning interferometer of the Linnik type. Two 0.95 NA objectives were used for this measurement. The wavelength used for all these measurements is 440 nm and the step size between every z-step is 20 nm. The measured sample contains several V-groove structures etched into silicon. The structure shown in the corresponding publication is the central V-groove structure.

Metadata

Authors
Dates
Available since: 2025-01-13
DOI
https://doi.org/10.48662/daks-60
Faculty
FB16:Elektrotechnik/Informatik
Department
Messtechnik
Language
en
Data types
Dataset
Keywords
silicon V-groovesinterferometry
DFG-subjects
407-02 Messsysteme
Funding
Funding Organisations:
Project Information:LE 992/14-3 und LE 992/16-1project TracOptic, 20IND07
License
http://creativecommons.org/licenses/by/4.0/
URI
https://daks.uni-kassel.de/handle/123456789/261
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Files
Document
Type
Size
Readme.txt
Text
604 B
V-groove_interferometric_measurement.zip
4.72 GB
Künne, Marco; Pahl, Tobias; Ribotta, Luigi; Giura, Andrea; Zucco, Massimo; Murataj, Irdi; Ferrarese Lupi, Federico; Lehmann, Peter. Surface slope measurement of steep silicon V-grooves using high NA Linnik interferometry [Dataset]. DaKS. https://doi.org/10.48662/daks-60

License

Attribution 4.0 International
Except where otherwised noted, this item's license is described as Attribution 4.0 International