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Pahl, Tobias

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Pahl

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Tobias

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Research Data

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    Frequency selective illumination for high aperture coherence scanning interferometry [Dataset]
    (Universität Kassel) Künne, Marco; Lehmann, Peter; Pahl, Tobias; Stelter, Andre
    This dataset containes raw measurement data from a coherence scanning interferometer of the Linnik type. Two 0.95 NA objectives were used for this measurement. The wavelength used for all these measurements is 450 nm and the step size between every z-step is 20 nm. Information about the different apertures used for the measurements are described in detail in the corresponding publication. IMPORTANT: In case you use the data please cite our corresponding article mentioned below.
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    Three-Dimensional Transfer Functions of Interference Microscopes [Dataset]
    Lehmann, Peter; Hagemeier, Sebastian; Pahl, Tobias
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    Surface slope measurement of steep silicon V-grooves using high NA Linnik interferometry [Dataset]
    (Universität Kassel) Künne, Marco; Pahl, Tobias; Ribotta, Luigi; Giura, Andrea; Zucco, Massimo; Murataj, Irdi; Ferrarese Lupi, Federico; Lehmann, Peter
    This dataset containes raw measurement data from a coherence scanning interferometer of the Linnik type. Two 0.95 NA objectives were used for this measurement. The wavelength used for all these measurements is 440 nm and the step size between every z-step is 20 nm. The measured sample contains several V-groove structures etched into silicon. The structure shown in the corresponding publication is the central V-groove structure.