This dataset containes raw measurement data from a coherence scanning interferometer of the Linnik type. Two 0.95 NA objectives were used for this measurement. The wavelength used for all these measurements is 440 nm and the step size between every z-step is 20 nm. The measured sample contains several V-groove structures etched into silicon. The structure shown in the corresponding publication is the central V-groove structure.
0009-0000-2761-641X